We stock a variety of new and made-to-order semiconductor spare parts from Semitool, AG Heatpulse, Tegal Etch, AMAT and more. We carry many critical parts in-stock and can ship most parts same-day to reduce your down time.
Obsolete part? No problem! We can help you source or fabricate a perfect replacement. Our semiconductor spare parts include consumables as well as tool replacement parts. We also offer Field Service Support and Service Contracts.
Parts Orders: (480) 609-8565, opt 2
Whether you know exactly what you need, or are looking for a compatible replacement, rely on us to get & keep your equipment in top running shape.
Replacement & Spare Parts Available for:
- AG Heatpulse 8108 RTP
- AG Heatpulse 8800 RTP
- Applied Materials P5000 CVD & Etch
- Endeavor PVD
- MRC Eclipse Mark IV PVD
- MRC Eclipse Star & Mark II PVD
- Semitool Cintillio SAT, SOT & SST
- Semitool Equinox CPT
- Semitool Spin Rinse Dryer (SRD)
- Tegal 6500 HRE Dual Frequency Etch
- Tegal 901ACS & 903 RF Diode Etch
- Varian Ion Implant
Also see: Semitool SRD Spare Part Finder