Spare Parts | SEMITOOL, AG, TEGAL, VARIAN & MORE

Spare Parts - Semitool, AG, Tegal, Varian & More

Trusted OEM Spares & Replacement Parts

We stock a variety of new and made-to-order semiconductor spare parts from Semitool, AG Heatpulse, Tegal Etch, AMAT and more.  We carry many critical parts in-stock and can ship most parts same-day to reduce your down time.

Obsolete part? No problem! We can help you source or fabricate a perfect replacement.  Our semiconductor spare parts include consumables as well as tool replacement parts.  We also offer Field Service Support and Service Contracts.

Parts Orders: (480) 609-8565, opt 2
Email: PartsSupport@oemgroupinc.com

Whether you know exactly what you need, or are looking for a compatible replacement, rely on us to get & keep your equipment in top running shape.

Replacement & Spare Parts Available for:

  • AG Heatpulse 8108 RTP
  • AG Heatpulse 8800 RTP
  • Applied Materials P5000 CVD & Etch
  • Endeavor PVD
  • MRC Eclipse Mark IV PVD
  • MRC Eclipse Star & Mark II PVD
  • Semitool Cintillio SAT, SOT & SST
  • Semitool Equinox CPT
  • Semitool Spin Rinse Dryer (SRD)
  • Tegal 6500 HRE Dual Frequency Etch
  • Tegal 901ACS & 903 RF Diode Etch
  • Varian Ion Implant

Also see: Semitool SRD Spare Part Finder

Semitool SRD Spare Parts