OEM Group Service and Technical Support

Service and Technical Support

OEM Group Global Service and Technical Support Introduction

OEM Group supports an international installed base of more than 35,000 systems. Withing our product lines OEM Group offers services and support for the following:

  • Chemical Process Technology/Surface Preparation: AMAT/Semitool (Batch systems and Cintillio SAT, SOT and SST)
  • CVD, PVD, Etch, RTP, Epi: Applied Materials (P5000)
  • Etch: Lam Research (Auto Etch), Tegal (900, 6500)
  • Ion Implant: Varian (most platforms)
  • PVD: MRC (Star, Mark II / IV), SFI (Endeavor™), AMS™
  • RTP: AG Associates (8100/8800)

Service and Support Packages Include:

  • On site or on call
  • After hours
  • Labor only
  • Labor and parts
  • Compressed or standard work weeks
  • Process engineering services
  • Product-specific upgrade kits
  • Preventive maintenance
  • Service contracts

Support Team:

  • 42 multi-product Customer Service engineers worldwide provide local, on-site field support
  • Service levels vary by region and are based on customer requirements
  • End-to-end product lifecycle management


  • Globally managed Supply Chain / Local Customer Service representatives
  • Multiple global stocking locations
  • Bonded warehousing in Asia (Taiwan and SEA)
  • Service levels vary by region and customer requirements

Global Technical Escalation:

  • Engagement at the 24-hour threshold
  • Global Technical Support provides 2nd level support
  • Product Engineering provides 3rd level support

Global Technical Training:

  • Instruction offered at training centers, or on site, by qualified system experts

Service and Diagnostics