As published in Solid State Technology on 9/5/2018: https://electroiq.com/2018/09/oem-group-introduces-next-generation-spin-rinse-dryer-srd/

OEM Group introduces next-generation Spin Rinse Dryer (SRD)

Global semiconductor capital equipment manufacturer OEM Group announced a major engineering design upgrade of its Semitool Spin Rinse Dryer, a platform for removing residual chemicals from semiconductor substrates and other materials such as optical lenses. The new SRD800 series features several upgrades, including a robust Windows OS, advanced automation, an intuitive GUI, and patent-pending SmartPartsuptime technology. Along with improved ergonomic functionality, the many system upgrades enhance management capabilities and gives users the ability to track and control operations in real time in order to significantly reduce overall cost of ownership.

OEM Group acquired the Semitool IP in 2011 and has continually added quality and reliability upgrades to its best-in-class SRD product — the world standard for high-performance cleaning, rinsing, and drying with more than 25,000 units currently in use. “The latest iteration was meticulously redesigned by listening to our customers,” said Rich Maduzia, OEM’s Global Product Marketing Manager. Three models are offered: Tabletop SRD810, Roll-around SRD815, and Stacker SRD820 — all of which include low-profile cassettes that can accommodate substrates of up to 200mm (round) and 175mm (square). The SRDHP series is for high-profile cassettes and can accommodate substrates of up to 200mm (round or square).

Key upgrades include: a newly designed frame that isolates vibrations to protect wafers, reduce wear-and-tear, and extend the SRD’s lifecycle; a slide-out tray for easy access to electrical components; and uniform nozzle spraying across wafers. The brushless motor has a high-resolution encoder with programmable acceleration/deceleration that delivers precise rotational speeds and quick accurate ramp up from 0 to 2,800 RPM, as well as precision control at low speeds.

The non-contact, programmable N2 (nitrogen gas) heater and blanket chamber heater provide more control over drying to prevent warping of substrates, an N2 purge saver — now a standard feature — can save up to 23 liters/min. at idle, and an N2 regulator prevents excessive pressure to protect against window cracking. Additionally, the new system includes DI (deionized water) monitoring and regulation that tracks water consumption, detects clogged nozzles and poor water pressure, and ultimately, saves water and money. Precision monitoring and data logging for N2 and DI usage enable process engineers to fine-tune operations to lower the cost of ownership over time.

The SRD800/SRD800HP series is built with industry standard components for quick repair and replacement. A major cost-saving feature is OEM’s SmartPartstechnology providing automatic tracking of components against the manufacturer’s suggested lifetime, enabling proactive maintenanceto prevent downtime failures. “The innovative, new system has component part numbers for reordering built right into the user interface, so it’s easy to take control and plan for downtime,” said Chris Forgey, OEM’s CTO. “SmartParts is now also integrated across all of OEM’s new tool platforms,” he added.

OEM Group is a global supplier of wafer fabrication equipment and services in the semiconductor industry offering a broad portfolio of products for thin film deposition, plasma etch, rapid thermal process, ion implantation, and wafer surface preparation used throughout the semiconductor manufacturing process flow and in Fabs worldwide.  In addition, OEM Group offers an Applications Lab for wet processing and Foundry Services for piezoelectric AlN and AINSc films as well as Global Services and Technical Support. For more information, visit www.oemgroupinc.com.