MRC Eclipse Star, Mark II and Mark IV physical vapor deposition (PVD) systems are manufactured exclusively by OEM Group. Leveraging our state-of-the-art manufacturing facilities, we offer both new and remanufactured systems, retrofits, upgrades, OEM-direct spare parts and field service.
MRC Eclipse Systems Include:
- 100mm to 200mm wafer size capability
- Front or backside metallization
- High throughput
- Low particle vertical sputtering