As an Original Equipment Manufacturer of the Lam AutoEtch platform, OEM Group offers:
- Remanufactured 490, 590, and 690 AutoEtchers
- Chamber retrofits and upgrades
- Wafer-size conversions
- Professional on-site service
- System repurposing
- Complete installations, start-up, and process support including full warranty
- Polysilicon: 490
- Oxide: 590
- Aluminum: 690
- Tungsten: 790
- Plasma / RIE etching (690)
Features:
- Single-wafer processing
- Fully automated microprocessor control
- Cassette-to-cassette wafer processing
- Vacuum load locked
- Programmable, variable electrode spacing
- Endpoint detection
- Configurable for 3-inch to 6-inch wafers
- Stand-alone or bulk-head mount configuration