As an Original Equipment Manufacturer of the Lam AutoEtch platform, OEM Group offers:

• Remanufactured 490, 590, and 690 AutoEtchers
• Chamber retrofits and upgrades
• Wafer-size conversions
• Professional on-site service
• System repurposing
• Complete installations, start-up, and process support including full warranty
• Polysilicon: 490
• Oxide: 590
• Aluminum: 690
• Tungsten: 790
• Plasma / RIE etching (690)

Features:

• Single-wafer processing
• Fully automated microprocessor control
• Cassette-to-cassette wafer processing
• Vacuum load locked
• Programmable, variable electrode spacing
• Endpoint detection
• Configurable for 3-inch to 6-inch wafers
• Stand-alone or bulk-head mount configuration