HF Vapor System

OEM Group Spray Batch

HF Vapor System Introduction

The HF Vapor platform delivers the OEM Group patented HF Vapor process. The on-axis, HDPE, process chamber can accommodate up to 25 wafers in a vertical orientation.

Process Applications:

  • Spring Release
  • Selective oxide etch
  • Hydrophobic termination


  • HDPE process chamber
  • Atmospheric process
  • MFC control
  • Up to 25-wafer loads
  • No DIW used in the process


  • No “memory” effect
  • Simple facilities
  • Precise, flexible process control
  • High throughput
  • Stiction free process
Other OEM Group Spray Batch Models

SST Batch Spray Solvent Tool

Spray Solvent Tool

SOT Batch Spray Ozone Tool

Spray Ozone Tool