G2 Eco-Strip System

OEM Group Spray Batch

G2 Eco-Strip Introduction

The Eco-Strip delivers the OEM Group patented, award winning, Hydrozone and Hydrozone+ processes. The Eco-strip platform, with its small footprint, 50-wafer load, stainless steel chamber and integral Ozone generator, has the most space efficient form factor of any batch, spray or immersion, tool in the industry today.

Process Applications:

  • Photoresist Strip
  • Post Ash clean
  • Polymer removal
  • Organic clean
  • Photo rework
  • Wax removal


  • Eliminates SPM, SC1
  • Zero to 7ml chemical consumption/run
  • Reduced DIW consumption up to 85%
  • 50-wafer payload
  • 1M2 footprint


  • Eliminates purchase and disposal costs
  • Reduces Cost per Wafer
  • High productivity
  • Space efficient
Other OEM Group Spray Batch Models

SST Batch Spray Solvent Tool

Spray Solvent Tool

SOT Batch Spray Ozone Tool

Spray Ozone Tool