The Eco-Strip delivers the OEM Group patented, award winning, Hydrozone and Hydrozone+ processes. The Eco-strip platform, with its small footprint, 50-wafer load, stainless steel chamber and integral Ozone generator, has the most space efficient form factor of any batch, spray or immersion, tool in the industry today.
Process Applications:
- Photoresist Strip
- Post Ash clean
- Polymer removal
- Organic clean
- Photo rework
- Wax removal
Features:
- Eliminates SPM, SC1
- Zero to 7ml chemical consumption/run
- Reduced DIW consumption up to 85%
- 50-wafer payload
- 1M2 footprint
Benefits:
- Eliminates purchase and disposal costs
- Reduces Cost per Wafer
- High productivity
- Space efficient