The Eco-Strip delivers the OEM Group patented, award winning, Hydrozone and Hydrozone+ processes. The Eco-strip platform, with its small footprint, 50-wafer load, stainless steel chamber and integral Ozone generator, has the most space efficient form factor of any batch, spray or immersion, tool in the industry today.

Process Applications:

• Photoresist Strip
• Post Ash clean
• Polymer removal
• Organic clean
• Photo rework
• Wax removal

Features:

• Eliminates SPM, SC1
• Zero to 7ml chemical consumption/run
• Reduced DIW consumption up to 85%
• 50-wafer payload
• 1M2 footprint

Benefits:

• Eliminates purchase and disposal costs
• Reduces Cost per Wafer
• High productivity
• Space efficient