The Eco-Clean delivers the OEM Group patented, award winning, Hydrozone and Hydrozone+, Fluorozone and Fluorozone+ processes. The Eco-Clean platform, with its small footprint, 50-wafer load, Teflon chamber/rotor and integral Ozone generator, has the most space efficient form factor of any batch, spray or immersion, tool in the industry today.

Process Applications:

• RCA Clean
• Polymer removal
• Photoresist strip
• Organic clean
• Trench clean
• Post Dice clean

Features:

• Eliminates SPM, SC1, SC2
• Zero to 7ml chemical consumption/run
• Reduced DIW consumption up to 85%
• 50-wafer payload
• 1M2 footprint

Benefits:

• Eliminates purchase and disposal costs
• Reduces Cost per Wafer
• High productivity
• Space efficient