G2 Eco-Clean System

OEM Group Spray Batch

G2 Eco-Clean Introduction

The Eco-Clean delivers the OEM Group patented, award winning, Hydrozone and Hydrozone+, Fluorozone and Fluorozone+ processes. The Eco-Clean platform, with its small footprint, 50-wafer load, Teflon chamber/rotor and integral Ozone generator, has the most space efficient form factor of any batch, spray or immersion, tool in the industry today.

Process Applications:

  • RCA Clean
  • Polymer removal
  • Photoresist strip
  • Organic clean
  • Trench clean
  • Post Dice clean

Features:

  • Eliminates SPM, SC1, SC2
  • Zero to 7ml chemical consumption/run
  • Reduced DIW consumption up to 85%
  • 50-wafer payload
  • 1M2 footprint

Benefits:

  • Eliminates purchase and disposal costs
  • Reduces Cost per Wafer
  • High productivity
  • Space efficient

Other OEM Group Spray Batch Models

SST Batch Spray Solvent Tool

Spray Solvent Tool

SOT Batch Spray Ozone Tool

Spray Ozone Tool