The Eco-Clean delivers the OEM Group patented, award winning, Hydrozone and Hydrozone+, Fluorozone and Fluorozone+ processes. The Eco-Clean platform, with its small footprint, 50-wafer load, Teflon chamber/rotor and integral Ozone generator, has the most space efficient form factor of any batch, spray or immersion, tool in the industry today.
Process Applications:
- RCA Clean
- Polymer removal
- Photoresist strip
- Organic clean
- Trench clean
- Post Dice clean
Features:
- Eliminates SPM, SC1, SC2
- Zero to 7ml chemical consumption/run
- Reduced DIW consumption up to 85%
- 50-wafer payload
- 1M2 footprint
Benefits:
- Eliminates purchase and disposal costs
- Reduces Cost per Wafer
- High productivity
- Space efficient