Cintillio G2 Eco-Clean System

Cintillio CPT

Cintillio G2 Eco-Clean Introduction

The Eco-Clean delivers the OEM Group patented, award winning, Hydrozone and Hyrdozone+, Fluorozone and Fluorozone+ processes. The Eco-Clean platform, with its small footprint, 50-wafer load, Teflon chamber/rotor and integral Ozone generator, has the most space efficient form factor of any batch, spray or immersion, tool in the industry today.

Download Brochure

Download Cintillio Eco Process Brochure (PDF)

Process Applications:

  • RCA Clean
  • Polymer removal
  • Photoresist strip
  • Organic clean
  • Trench clean
  • Post Dice clean

Features:

  • Eliminates SPM, SC1, SC2
  • Zero to 7ml chemical consumption/run
  • Reduced DIW consumption up to 85%
  • 50-wafer payload
  • 1M2 footprint

Benefits:

  • Eliminates purchase and disposal costs
  • Reduces Cost per Wafer
  • High productivity
  • Space efficient

OEM Group Cintillio Eco-Strip Tool

Other Cintillio CPT Models

Cintillio SST Batch Spray Solvent Tool

Cintillio Spray Solvent Tool

Cintillio SOT Batch Spray Ozone Tool

Cintillio Spray Ozone Tool