AGHeatpulse 8800 RTP

AG Associates

AGHeatpulse 8800 RTP Introduction

The AGHeatpulse 8800 is designed to meet device manufacturers’ advanced rapid thermal processing needs. This cassette-to-cassette system is the industry’s lowest cost of ownership RTP solution. Superior process results and high throughput are achieved within a small footprint – with the reliability you expect from a AGHeatpulse product. OEM Group is the exclusive OEM-licensed manufacturer of the AGHeatpulse 8800.

Superior Process Control—Improved Yield

  • Single wafer, closed-loop temperature and power control with per-lamp power modules
  • Automatic susceptor loading configuration for exotic substrate processing

Advanced Temperature Measurement and Control

  • Pyrometer or ez-DTC temperature control with redundant backup for consistent processing
  • Emissivity independent control with optional ceramic shield

High Productivity

  • N2 curtain, low mass quartz and fast chamber purge for rapid process gas changes
  • Continuous pick-and-place wafer processing

Integrated Applications

  • Silicon, GaAs, and compound substrates
  • Implant activation & anneal
  • Thermal oxidation / nitridation
  • Metal silicidation (Ti, Co, Ni)
  • Low-K dielectric anneal
  • Gate anneal
  • Glass flow / reflow
  • SOG densification

AGHeatpulse 8800 RTP

AGHeatpulse 8800 Upgrades

eZ-DTC Control

ez-DTC Probe

in-Situ Oxygen Monitor

O2 Analyzer