Semiconductor Equipment Manufacturers

the most disruptive Spray Batch technology has arrived

Expanded process and control windows Zero-maintenance tanks Advanced OS integrating predictive maintenance Innovative chamber design Common rotor design for multiple substrate sizes

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Touch screen graphical control system Advanced diagnostics and prognostics Programmable non-contact N2 heater Quick ramp motor with precision spin speed

the #1 SRD
on the PLANET
just got better

more intelligent

making your platforms

automatic tracking of mechanical
components against manufacturers
recommended lifetime

critical component monitoring

predictive maintenance

easy reference for part ordering
built into software

OEM Group Announces Sale of SFI Endeavor, MRC Eclipse, AG Heatpulse and Tegal Product lines to Plasma-Therm.

OEM Group/Plasma-Therm Customer Communication Letter

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PRODUCT PORTFOLIO

Production proven systems for both development and high volume 75mm to 300mm manufacturers of Optoelectronics, MEMS + Sensors, Discretes, and Advanced Packaging devices.

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SNAPSHOT

Celebrating 20 Years