the most disruptiveSpray Batch technologyhas arrivedExpanded process and control windowsZero-maintenance tanksAdvanced OS integrating predictive
maintenanceInnovative chamber designCommon rotor design for multiple
substrate sizesMore Info
More Info
Touch screen graphical control systemAdvanced diagnostics and prognosticsProgrammable non-contact N2 heaterQuick ramp motor with precision spin speed
the #1 SRD on the PLANET
just got better
more intelligent
making your platforms
automatic tracking of mechanical
components against manufacturers
recommended lifetime
critical component monitoring
predictive maintenance
easy reference for part ordering
built into software
OEM Group Announces Sale of SFI Endeavor, MRC Eclipse, AG Heatpulse and Tegal Product lines to Plasma-Therm.
OEM Group/Plasma-Therm Customer Communication Letter
Production proven systems for both development and high volume 75mm to 300mm manufacturers of Optoelectronics, MEMS + Sensors, Discretes, and Advanced Packaging devices.