The Varian® implant systems are proven platforms with a wide range of processes
utilized by a large global install base. More than a production tool, the Varian
systems will be an implant contributor to your production line for years to come.

- Production-proven solution - Industry lowest CoO - High Throughput -

We own all IP and product stewardship for these Varian Products.

We offer the following services:

  Tool Sales   Upgrades
  Parts Supply
    - Consumable & Non Consumable
  Repair Service
    - Remedial & Contract Support
  Exchange & Refurbishments
    - Disks, Power Supplies
  Tool Moves & Installations
  Refurbishments
    - Insitu Overhauls
  Engineering & Technical Support
  Accel Columns  

 

We are the Global OEM for these Varian Products

 

 

APPLICATIONS

  Power Device  Memory   Logic   Analog  Discrete  MEMS


Wafer Sizes:  100mm, 125mm & 150mm

 

Medium Current- 350D
  Dopant Species B+ , As+, P+
  Energy 35 - 200 keV
  Variable Extraction 10 - 35 keV
  Beam Current Max 1.5mA As+, P+
0.6mA B+
  Dose Range 1E11 to 1E15 at/cm2
  Dose Uniformity 1< 0.75%
  Dose Repeatability 1< 0.75%



High Current - Batch XP Series
(80XP, 120XP, 160XP & 180XP)

     
Maximum Beam Current
Energy Range
 
160 - 180 kV
60 - 160kV
40 - 120kV
80XP 10-80kV
B+
2 mA
5 mA
5 mA
120XP 10-120kV
As+, P+
 5 mA
10 mA
10 mA
160XP 10-160kV
Sb+ (to 100kV max)
n/a
5 mA
 5 mA (to 80kV max)
180XP 10-180kV
BF2+
2 mA
7 mA
7 mA

 

Dopant Species  

Implant Dose Accuracy

B+, BF2, As+, P+, Sb+   Range
1E12 - 1E17
    Uniformity
    High Dose (>1E14 ions/cm2)    
1< 1.0%
    Low Dose (<1E14 ions/cm2)     
1< 2.0%
    Repeatability
1< 1.0%
   
(All processes including photoresist & insulating surfaces)