Tegal Thin-Film Etch and PVD

OEM Group is the exclusive manufacturer of the Tegal 900 and 6500-Series Thin Film Etch, as well as the Endeavor and AMS PVD Platforms. Utilizing state-of-the-art manufacturing facilities, OEM Group offers both new and refurbished systems, retrofits, upgrades, OEM-direct spare parts, and field service.

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Thin-Film Etch:
901ACS™
903ACS™
981ACS™
6500 HRe—™ Series

PVD:
Endeavor AT™
EndeavorEUV™
AMS SMT™