Gold Series (remanufactured) Spin Rinse Dryer

Applications:

• Residual chemical removall

Features and Specifications:

• PSC-107 programmable controller, featuring operations, process and maintenance modes
  
• User programmable auto cycle (AC-10)
  
• DI water resistivity Monitoring (RM-20) allows users to rinse to a certain resistivity before tool continues to next recipe step
  
• Anti-Stat (CY-20) removes static charge from inside the process chamber
  
• Emergency machine off (EMO) buttons

Benefits

• Uniform DI water distribution over wafers using nine-nozzle manifold
  
• One button operation
  
• Over 95% up time
  
• Low cost of ownership (use of DI and N2 utilities only)
  
• Controller system built using off-the-shelf components
  
• Optimized for low particles
  
• Electro-polished chamber, rotor, and manifolds
  
• EGF bowl seal