The Rainbow series of products addresses processes that utilize wafer sizes up to 200 mm and feature sizes as small as 0.35 micron. The Rainbow product line includes the Rainbow 4400, 4500, 4600 and 4700 series for etching polysilicon, oxide, aluminum and tungsten films, respectively.

OEM Group Remanufacturing Capabilities Include:
• Remanufactured Lam Etch Systems
• Chamber Retrofits and Upgrades
• Wafer Size Conversions
• Professional Onsite Service
• System Repurposing
• Complete Installations, Startup, and Process Support Including Full Warranty