OEM Group offers a cost effective alternative for ReNEWing of OAR robots on the Novellus Concept One platform. Robots that utilize old style motors can now be ReNEWed using new motors that are compatible with the old style motor controllers, eliminating the need for costly conversion to new motors and controllers. The ReNEWing program replaces all parts subject to normal wear or high failure rate.

A robot exchange program is available in addition to the ReNEWing of a customer owned robot. The exchange service allows customers who do not stock a ReNEWed robot to reduce production down time associated with PM’s by scheduling a ReNEWed robot to be on site before the PM.

Available Services:
• ReNEW
• Exchange
• New

Typical Performance Failure Modes:
• Rotation errors
• Extension time out errors
• Dropped or misplaced wafers
• Excessive noise
• High mechanical particle counts
• X, Y, Z Axis Backlash

ReNEWing Procedures:
• Robot ReNEWing is performed at OEM Group facility by trained staff using documented procedures. ReNEWing steps include:
• Receipt and Inspection
• Teardown/Disassembly
• Assembly
• Test and Quality Assurance

Features & Benefits:
New consumables and replaced components
• Extended life
• Improved product performance
Customizable service programs
• Offers customers the flexibility to choose which program is right for them
Robust inventory of critical components
• Provides fast turn around time minimizing tool downtime
24 hour burn-in test cycle on dedicated test station
• Affirms functionality and repeatability of assembly upon delivery
12-month warranty (Original Manufacturer’s Warranty is 90 days)
• Guaranteed product performance with Certificate of Compliance
90v to 70v Motor Upgrades Available
• Higher torque output across operating range
• Cooler operating temperature for longer service life