OEM Group continues its commitment to extending the service life of Novellus systems with an improved heater block design featuring superior material selection and refined manufacturing procedures. The OEM Group heater block eliminates the dead space in the element channel by utilizing a machined fit element holding plate greatly improving the element contact and heat transfer uniformity to the heater main body. The enhanced design heater block contains superior welds and metal composition along with optimized design heater elements created for a significant increase in component life.

Typical Performance Failure Modes:
• High Film Uniformity
• Opening up of Heater Element
• Heater Element cracking and arcing

Includes:
• 3003 Forged Aluminum Block
• Fitted Heater Elements
• Spindle Mount
• Supporter Blocks

Features & Benefits Include
Drop In Replacement Component
• Lower Cost of Ownership
Upgraded Fitted Heater Elements
• Increased Reliability
• Better temperature conductance throughout
• Metal to metal contact eliminates hot spots
• Tested for impedance and capacitance to insure RF leakage control
3003 Forged Aluminum
• Superior material for added life to heater
• Reduces corrosion and is easier to clean
e-Beam Welding
• Less susceptible to cracking
• Reduced particles and peeling issues
• Superior metal compositions for longer life
Improved Manufacturing
• Focused on extended life and enhanced product performance