OEM Group offers a remanufacturing solution to provide customers with a Novellus CVD system that has been custom built to “like new” condition complete with new state of the art components, a warranty that is the same as the Original Equipment Manufacturer, and upgrades designed to greatly improve system performance.

With the capability of processing up to seven wafers simultaneously and the multi-station continuous processing capabilities, the Novellus Concept One & Novellus Concept Two addresses the following performance parameters:
• Yield and Film Quality
• High Throughput
• Process Repeatability