The MRC Mark IV physical vapor deposition (PVD) system is manufactured exclusively by OEM Group. Utilizing state-of-the-art manufacturing facilities, service and support are worldwide: Asia, China, Europe, Israel and the U.S. OEM Group is the exclusive OEM-licensed manufacturer of the MRC Eclipse Mark II. New and remanufactured systems are available.

The MRC Eclipse Mark IV is an ultra-high vacuum (UHV), serially indexed, vertical wafer plane, physical vapor deposition system designed for front and backside metallization of semiconductor wafers. The Mark IV is the fourth generation Eclipse system in a family of advanced, reliable and high productivity PVD systems. The system incorporates process enhancements and product improvements while still utilizing the same proven layout and features of the Eclipse product line.

• High throughput
• High uptime
• Low particle vertical sputtering
• Vacuum isolated process chambers
• Reactive sputtering
• Large process portfolio
• Superior process control
• Small footprint
• Exceptional reliability
• Front or backside metallization on wafers up to 200mm
• Low cost of ownership
• Wafers up to 200mm diameter
• SEMI S2-93A and CE compliance

Integrated Applications
• Contact layers - silicides
• Interconnects
• Barriers
• Packaging (bump and backside)
• GaAs and compound substrates
• Discretes
• Resistors (inkjet and optoelectronics)
• Conductors (inkjet and optoelectronics)