MRC™ Eclipse Mark II & Star

 

MRC Mark II physical vapor deposition (PVD) system is manufactured exclusively by OEM Group. Utilizing state-of-the-art manufacturing facilities, service and support are worldwide: Asia, China, Europe, Israel and the U.S. OEM Group is the exclusive OEM-licensed manufacturer of the MRC Eclipse Mark II. New and remanufactured systems are available.

Applications

  • Contact layers – silicides
  • Interconnects
  • Barriers
  • Packaging (bump and backside)
  • GaAs and compound substrates
  • Discretes
  • Resistors (inkjet and optoelectronics)
  • Conductors (inkjet and optoelectronics)

Features & Benefits

  • High throughput
  • High uptime
  • Low particle vertical sputtering
  • Vacuum isolated process chambers
  • Reactive sputtering
  • Large process portfolio
  • Superior process control
  • Small footprint
  • Exceptional reliability
  • Front or backside metallization on wafers up to 200mm
  • Low cost of ownership
  • Wafers up to 200mm diameter
  • SEMI S2-93A and CE compliance