MRC™ Eclipse Mark II & Star

MRC Mark II physical vapor deposition (PVD) system is manufactured exclusively by OEM Group. Utilizing state-of-the-art manufacturing facilities, service and support are worldwide: Asia, China, Europe, Israel and the U.S. OEM Group is the exclusive OEM-licensed manufacturer of the MRC Eclipse Mark II. New and remanufactured systems are available.

Applications

• Contact layers – silicides
• Interconnects
• Barriers
• Packaging (bump and backside)
• GaAs and compound substrates
• Discretes
• Resistors (inkjet and optoelectronics)
• Conductors (inkjet and optoelectronics)

Features & Benefits

• High throughput
• High uptime
• Low particle vertical sputtering
• Vacuum isolated process chambers
• Reactive sputtering
• Large process portfolio
• Superior process control
• Small footprint
• Exceptional reliability
• Front or backside metallization on wafers up to 200mm
• Low cost of ownership
• Wafers up to 200mm diameter
• SEMI S2-93A and CE compliance