Lamâ„¢ AutoEtch

As an Original Equipment Manufacturer of the Lam AutoEtch platform, OEM Group offers:

  • Remanufactured 490, 590, and 690 AutoEtchers
  • Chamber retrofits and upgrades
  • Wafer-size conversions
  • Professional on-site service
  • System repurposing
  • Complete installations, start-up, and process support including full warranty
    • Polysilicon: 490
    • Oxide: 590
    • Aluminum: 690
    • Tungsten: 790
    • Plasma / RIE etching (690)

  • Single-wafer processing
  • Fully automated microprocessor control
  • Cassette-to-cassette wafer processing
  • Vacuum load locked
  • Programmable, variable electrode spacing
  • Endpoint detection
  • Configurable for 3-inch to 6-inch wafers
  • Stand-alone or bulk-head mount configuration