Cintillio™ Designed With End-User
Convenience In Mind

Capable of meeting any wet application demand, CAD-designed Cintillio™ products break new technological ground in 25/50 wafer batch process. Our versatile wet-chemical processing Cintillio family was conceptualized with an eye on productivity and fab operation convenience. Spray Acid Tool (SAT), Spray Solvent Tool (SST) and Spray Ozone Tool (SOT) feature convenient side access, which makes routine maintenance both safe and user friendly. And Cintillio’s innovative and proprietary Enhanced Spray Technology™ — featuring up to six rows of nozzles — ensures high throughput and reliable wafer surface wetting with chemical mixtures.

Cintillio can be configured with up to four onboard chemical tanks, external support of chemical delivery units (CDUs), external O3 generators for Ozone processes and 25- or 50-wafer process loads.

Cintillio processes multiple wafer sizes with a single carrier change.

And with the smallest footprint among similar equipment, Cintillio products not only save fab floor space, they also enable high up-time and low cost of ownership.