CVD/PVD Heater ReNEWing

The OEM Group Heater ReNEWing program offers the customer the opportunity to extend the life of their failed heater. We have the capability to ReNEW most common failure modes including uniformity issues, leaks and mechanical damage. All machining and testing is conducted in-house by our staff of precision machinists and fab engineers.

With over 700 ReNEWs conducted since 2002, OEM Group has become a trusted source for supplying “Like New” heaters worldwide. Our ReNEWing program is designed to minimize downtime, maximize productivity, and lower operating costs.

Remanufactured to a “Like-New” condition

CVD Expertise
• Applied Materials Centura CxZ, DxZ, WxZ
• Applied Materials Endura TxZ
• Also Available: Novellus Concept Two Altus W CVD

PVD Expertise
• 4F, 6F, HTH, HTHU (a.k.a. ZX)
• A101, B101
• MCA+ ESC

Benefits:
• Increased assembly life
• Reduced inventory requirements
• Fast turn-time
• Average 17 days dock-to-dock

Heater ReNEW Process Flow:
• Inspection
• Disassembly
• Component Sourcing
• Heating & Leak Test
• Final Inspection
• Cleaning
• Packaging and Shipping

 

 

 



CVD and PVD Heater ReNEWing


Centura WxZ Heater


Endura PVD Heater


Also Available: Heater ReNEWing Services for Novellus Concept Two Altus