Lam Alliance Etch
Wafer Size: 100mm – 200mm

 

The Alliance tool series supports processes that utilize wafer sizes up to 200 mm and feature sizes of 0.25 micron and 0.18 micron. Alliance products include the 4420, 4520 and 4720 series as well as the 9400SE and 9600SE, and the DSQ & Microwave Strip.