The Alliance cluster tool series of products addresses processes that utilize wafer sizes up to 200 mm and feature sizes of 0.25 micron and 0.18 micron. The Alliance product line includes 4420, 4520, and 4720 series, 9400SE and 9600SE, and DSQ & Microwave Strip

OEM Group Remanufacturing Capabilities Include:
• Remanufactured Lam Alliance Etch Systems
• Chamber Retrofits and Upgrades
• Wafer Size Conversions
• Professional Onsite Service
• System Repurposing
• Complete Installations, Startup, and Process Support Including Full Warranty