AGHeatpulse 8108 RTP

The AGHeatpulse 8108 and 8800 rapid thermal processing (RTP) system is manufactured exclusively by OEM Group. Utilizing state-of-the-art manufacturing facilities, OEM Group offers both new and refurbished systems, retrofits, upgrades, OEM-direct spare parts, and field service.

AGHeatpulse 8108 and 8800 Systems:
• Automated wafer handling from 75mm to 200mm
• Atmospheric pressure, Halogen Lamp technology
• 28 Lamps in patented cross lamp design
• Pyrometer control from 400C to 1200C
• Thermocouple control from 200C to 1200C
• Small footprint – only 18 sq ft
• 10 lamp control zones for 8108

AGHeatpulse 8108 RTP   AGHeatpulse 8800 RTP