At OEM Group, we have now completed over 1,400 projects since 1999, and our proven Remanufacturing procedures provides the production performance and process confidence required in today’s manufacturing environment.

Offering 75-200mm solutions for the Silicon, MEMS, LED, Power Device, RFID, PV, and Optics markets, OEM Group is the global remanufacturing leader for equipment, upgrades, spares, and services of: MRC; AG Associates; Varian; Lam; Tegal; AMAT; Novellus; and Mattson platforms. All our Remanufactured systems include installation, start-up, right-to-use software licensing, and warranty support.

Unlike other companies which focus on only supplying you a tool, OEM Group is committed to providing you sustaining service, spares, and process support throughout the production lifecycle of your tool. Utilizing our Engineering Design Center and Applications Lab, we continue to develop both productivity and technology upgrades providing you complete engineering and process support.

• MRC Eclipse Star, Mark II, and Mark IV PVD
• AGHeatpulse 4100, 8108 and 8800 RTP
• Tegal 900ACS, and 980ACS Thin Film Etch
• Tegal 6500 HRe and Spectra Thin Film Etch
• Sputtered Films Endeavor PVD
• AMS SMT PVD
• Varian 120XP, 160XP, and 350D Implanters
• Lam 490, 590, and 690 AutoEtch
• AMAT Enduras, Centuras, and P5000s
• Novellus Concept One and Two
• Mattson Aspen II Ashers
• Lam Alliance and Rainbow

Additionally, we offer:
• Chamber additions
• Wafer size conversions
• Engineering design and component modeling
• Equipment design optimization
• Spare parts products and services
• Robots and robot arm assemblies
• PVD/CVD Heater ReNEWing
• Asset acquisition during facilities consolidation

Corporate Profile
Founded: 1999
Personnel: 125

Global operating locations in:
North America
Europe
Japan
China
Taiwan
Singapore

Global Headquarters
Designed for tool manufacturing operations
Building: 45,000 ft2 (approx 4,200 m2) + 33,000 ft2 off-site warehousing
Class 1,000 Cleanroom
12 Dedicated Manufacturing Bays
Capacity for 20 – 24 systems
2 Functional Facilities Chases