Proven Technology for a New World

By acquiring “best-in-class” technologies and offering them globally from centralized sources, OEM Group serves both traditional semiconductor device makers as well as emerging technology sectors. An expert in 75mm – 200mm capital equipment, OEM Group serves the LED, MEMS, Power Electronics, Compound Semi, WLP and Logic & Memory industries.

Fully integrated solutions. World class service. Applications development. All from one cost-effective innovator.

Our proven LEGENDS^™ technology portfolio is based on exclusive intellectual property acquired from leading semiconductor brands, including: Tegal (thin-film etch), Sputtered Films Endeavor^™ (PVD), AMS (PVD), MRC Eclipse^™ (PVD), AG Heatpulse^® (RTP), Varian Sunset^™ (Implant) and Lam Research AutoEtch^™. Within LEGENDS, and as part of our Chemical Process Technology^™ group, we offer Cintillio^™-brand SOT, SST and SAT surface-preparation systems, as well as Spin Rinser Dryer (SRD), STORM^™ and Sirius^™ tools retained as a result of our 2011 Applied Materials/Semitool product line acquisition. And, thanks to a September 2012 global licensing agreement with Applied Materials, the latest LEGENDS family member is P5000^™, the industry’s most successful single-wafer, multiple-chamber CVD and etch processing platform.