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Proven Technology for a New World

By acquiring “best-in-class” technologies and offering them globally from centralized sources, OEM Group serves both traditional semiconductor device makers as well as emerging technology sectors. An expert in 75mm – 200mm capital equipment, OEM Group serves the LED, MEMS, Power Electronics, Compound Semi, WLP and Logic & Memory industries.

Fully integrated solutions. World class service. Applications development. All from one cost-effective innovator.

OEM Group is a global manufacturer of new and remanufactured semiconductor capital equipment and upgrades focused on innovative and sustaining solutions for emerging markets. Our proven LEGENDS™ portfolio consists of exclusive intellectual property acquired from leading semiconductor brands, including: P5000™, Tegal™ Etch, Sputtered Films® Endeavor™, MRC® Eclipse™, AGHeatpulse®, Varian® Sunset™, Lam® AutoEtch™ and SEMITOOL® Manual Batch, Automated Batch and Single Wafer Equinox™. In addition to the LEGENDS™ lines, OEM offers an Applications Development lab for wet processing and Foundry services for piezoelectric AlN films.



Systems│ Engineering │ Upgrades │ Service │ Spares │ Foundry

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